Photonic integrated circuits (PICs) have emerged as a scalable platform forcomplex quantum technologies using photonic and atomic systems. A central goalhas been to integrate photon-resolving detectors to reduce optical losses,latency, and wiring complexity associated with off-chip detectors.Superconducting nanowire single-photon detectors (SNSPDs) are particularlyattractive because of high detection efficiency, sub-50-ps timing jitter,nanosecond-scale reset time, and sensitivity from the visible to themid-infrared spectrum. However, while single SNSPDs have been incorporated intoindividual waveguides, the system efficiency of multiple SNSPDs in one photoniccircuit has been limited below 0.2% due to low device yield. Here we introducea micrometer-scale flip-chip process that enables scalable integration ofSNSPDs on a range of PICs. Ten low-jitter detectors were integrated on one PICwith 100% device yield. With an average system efficiency beyond 10% formultiple SNSPDs on one PIC, we demonstrate high-fidelity on-chip photoncorrelation measurements of non-classical light.
展开▼
